What is MEMS?
MEMS stands for Micro-ElectroMechanical Systems. MEMS techniques allow both electronic circuits and mechanical devices to be manufactured on a silicon chip, similar to the process used for integrated circuits. This allows the construction of items such as sensor chips with built-in electronics that are a fraction of the size that was previously possible.
MEMS Products
Four devices using MEMS technology have been commercially successful for several years.
MEMS accelerometer chips used to trigger airbags
MEMS mirror chips for use in projection screen TVs
MEMS inkjet nozzles used in printers
MEMS pressure sensors for medical applications
MEMS Products under Development
Several interesting new products and applications are being developed using MEMS.
MEMS - piezoelectric generator being developed for self contained wireless sensors
Computer game controller using MEMS accelerometer.
MEMS gyroscope with features that significantly lower the cost of integrating the gyroscope into industrial equipment.
MEMS microphones that are smaller and more resistant to heat than conventional microphones.
MEMS RF switches to reduce power losses in microwave applications.
MEMS blood pressure sensor with wireless data transfer that can be implanted in patients.
MEMS oscillators that are smaller and more integrated with electronics circuits than current quartz oscillators.
MEMS Company Directory
| Company | MEMS Products |
| MicroGen Systems | Piezoelectric generator that transforms vibrational energy into electricity |
| Analog Devices | Accelerometers and gyroscopes |
| STMicroelectronics | Accelerometer based motion sensors |
| MEMSCAP | Custom products as well as blood pressure sensors for the medical field and air pressure sensors for the aircraft industry |
| Silex Microsystems | Custom products including mirror arrays for fiber optic switching, pressure and flow sensors for medical applications |
| Tronics Microsystems | Custom products including accelerometers, pressure sensors, scanning mirror, and RF switches |
| SiTime | Oscillators |
| Debiotech | Insulin pump |
| Baolab | MEMS produced with CMOS production methods |
MEMS Resources
MEMS at Sandia National Laboratory
MEMS Industry Group; a trade association for MEMS industries
National Science Foundation Research Center for Microsensors and Microactuators
Center for MEMS and Micosystems Technology
Laboratory for Integrated Micro Mechatronic Systems (LIMMS)